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\documentclass[]{article}
\pagestyle{empty}
\setlength\textwidth{355.65944pt}
\setlength\parindent{0pt}
\setlength\parskip{10pt}
\usepackage[utf8]{inputenc}
\usepackage[ngerman]{babel}

\usepackage{booktabs}
\usepackage{amssymb}
\usepackage{units}
\usepackage{textcomp}
\usepackage{multirow}
\usepackage{bigdelim}
\usepackage{rotating}

\begin{document}
\rotatebox{90}{%
\sffamily\small
\begin{tabular}{@{}lccccclll@{}}\toprule
Autor & Fläche & Airgap & Empfindl. &
Frequenz & Rauschen & Materialien & Quellen & Aufbauart \tabularnewline
& & & & & & Membran, Elektrode & & \tabularnewline
\cmidrule(lr){2-2}\cmidrule(lr){3-3}\cmidrule(lr){4-4}\cmidrule(lr){5-5}\cmidrule(lr){6-6}
  & \unit{mm\textsuperscript{2}} & \unit{\textmu m} & \unit{mV/Pa} &
    \unit{Hz-kHz} &  \unit{dBA SPL} & & & \tabularnewline
\cmidrule(r){1-1}\cmidrule(lr){2-2}\cmidrule(lr){3-3}\cmidrule(lr){4-4}\cmidrule(lr){5-5}
\cmidrule(lr){6-6}\cmidrule(lr){7-7}\cmidrule(lr){8-8}\cmidrule(l){9-9}
\addlinespace
% Tabellenkopf Ende
Schellin & 1 & & 0,3 & -- & & Poly-Si, Poly-Si &
[6,7,9] &%\cite{Schellin:1997:01,Schellin:1994:01,Schellin-1993-01} &
\tabularnewline
van der Donk & & & & & & &
[12] &%  \cite{Donk:1992:01} &
\tabularnewline
Bernstein & 0,57 & 2,2 & 10,77 & -20 &--& Nitrid, Gold &
[13] &%\cite{Kabir:1999:01} &
\tabularnewline
Chen &-- &2 &40 &50--15 &-- &Poly-Si, Mono-Si &
[17,18]&%\cite{Chen:2002:01,Chen:2003:01} &
\tabularnewline
Dehé & $\varnothing$1.2&1 &3,2 &100--10 &30 &Poly-Si, Epi-Poly &
[19,10] &%\cite{Dehe:1999:01,Brauer:2001:01} &
\tabularnewline
Hsu &2 &4 &--&200--10 &&Poly-Si, Mono-Si &
[7]&%\cite{Hsu:1998:01} &
\tabularnewline
Kronast &2 &1,3 &11 &300--20&--&Nitrid+Alu, Mono-Si &
[20,21,22]&%\cite{Kronast:1996:01,Kronast:2001:01,Stoffel:1999:01} &
\tabularnewline
Li &1 &--&9,6 &100--19&--&Poly-Si, Poly-Si &
[1,24]&%\cite{Li:2001:01,Wang:2004:01} &
\tabularnewline
Pedersen & 4,84 &3,6 &--&100--15 &60 &Gold, Polymid &
[2,6]&%\cite{Pedersen:1997:01,Pedersen:1998:01} &
\tabularnewline
Rombach &1 &0,9 &14 &20--10&22,5 &Poly-Si, Poly-Si &
[17,18]&%\cite{Rombach:2000:01,Rombach:2002:01} &
\tabularnewline
Kovács &0,25 &1,5 &-- &-- &-- &Poly-Si, Poly-Si &
[25,26]&%\cite{Kovacs:1995:01} &
\tabularnewline
Torkkeli &1 &1,3 &2 &10--12 &35 &Poly-Si, Poly-Si &
[26]&%\cite{Torkkeli:2000:01} &
\rdelim\}{-12}{1mm}[1 Chip] \tabularnewline
\addlinespace
\cmidrule(r){1-1}\cmidrule(lr){2-2}\cmidrule(lr){3-3}\cmidrule(lr){4-4}\cmidrule(lr){5-5}
\cmidrule(lr){6-6}\cmidrule(lr){7-7}\cmidrule(lr){8-8}\cmidrule(l){9-9}
\addlinespace
Bay &4 &0,4 &27 &&&&
[26,27,28,30]&%\cite{Bay:1999:01,Bay:1996:01,Bay:1997:01,Bouwstra:1998:01} &
\tabularnewline
Füldner&&&&&&&&\tabularnewline
Tajima &4 &15 &7 &75--24 &-- &Oxid, Mono-Si &
[29]&%\cite{Tajima:2003:01} &
\rdelim\}{-3}{1mm}[2 Chip] \tabularnewline
\addlinespace
\cmidrule(r){1-1}\cmidrule(lr){2-2}\cmidrule(lr){3-3}\cmidrule(lr){4-4}\cmidrule(lr){5-5}
\cmidrule(lr){6-6}\cmidrule(lr){7-7}\cmidrule(lr){8-8}\cmidrule(l){9-9}
\addlinespace
Kressmann &1 &1 &2,9 &100--10&39 &Oxid+Nitrid, Poly-Si&
[11,12]&%\cite{Kressmann:2001:01,Kressmann:2002:01} &
\tabularnewline
Thielemann & & & & & & &
[8] & \tabularnewline% \cite{Thielemann:1997:01} & \tabularnewline
Hsieh & 64 & 4,5 & 40 & 100--10 & 60 & Nitrid, Nitrid &
[1,2,4] & \tabularnewline %\cite{Hsieh:1997:01,Hsieh:1999:01,Hsieh:2001:01} & \tabularnewline %,Hsu:1996:01
Murphy & -- & -- & 8 & 100--15 & -- &
Al + Nitrid, Mono-Si&
[3] & \tabularnewline % \cite{Murphy:1989:01} & \tabularnewline
Zou & 1 & 2,6 & 14,2 & 9--16 & -- & Poly-Si , Mono-Si &
[7] & %\cite{Zou:1997:01,Zou:1998:01} &
\rdelim\}{-5}{1mm}[Elektret] \tabularnewline
\addlinespace
\bottomrule
\end{tabular}}% end of rotatebox
\end{document}
